Please use this identifier to cite or link to this item: https://hdl.handle.net/20.500.11851/6694
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dc.contributor.authorFeng, Junbo-
dc.contributor.authorChen, Yao-
dc.contributor.authorBlair, John-
dc.contributor.authorKurt, Hamza-
dc.contributor.authorHao, Ran-
dc.contributor.authorCitrin, D. S.-
dc.contributor.authorZhou, Zhiping-
dc.date.accessioned2021-09-11T15:43:13Z-
dc.date.available2021-09-11T15:43:13Z-
dc.date.issued2009en_US
dc.identifier.issn1071-1023-
dc.identifier.urihttps://doi.org/10.1116/1.3079662-
dc.identifier.urihttps://hdl.handle.net/20.500.11851/6694-
dc.description.abstractIn this article, the fabrication process of annular photonic crystals on silicon-on-insulator wafers was addressed for the first time. A self-alignment procedure for nanofabrication using atomic layer deposition and sacrificial etching was established to place accurately nanosized dielectric rods in nanosized circular air holes. Avoiding the challenging electron-beam lithography alignment, this method achieves atomic level precision and shows high stability. (C) 2009 American Vacuum Society. [DO]: 10.1116/1.3079662]en_US
dc.language.isoenen_US
dc.publisherA V S Amer Inst Physicsen_US
dc.relation.ispartofJournal of Vacuum Science & Technology Ben_US
dc.rightsinfo:eu-repo/semantics/closedAccessen_US
dc.subject[No Keywords]en_US
dc.titleFabrication of Annular Photonic Crystals by Atomic Layer Deposition and Sacrificial Etchingen_US
dc.typeArticleen_US
dc.departmentFaculties, Faculty of Engineering, Department of Electrical and Electronics Engineeringen_US
dc.departmentFakülteler, Mühendislik Fakültesi, Elektrik ve Elektronik Mühendisliği Bölümütr_TR
dc.identifier.volume27en_US
dc.identifier.issue2en_US
dc.identifier.startpage568en_US
dc.identifier.endpage572en_US
dc.authorid0000-0002-5064-0511-
dc.identifier.wosWOS:000265839400004en_US
dc.identifier.scopus2-s2.0-64549127418en_US
dc.institutionauthorKurt, Hamza-
dc.identifier.doi10.1116/1.3079662-
dc.relation.publicationcategoryMakale - Uluslararası Hakemli Dergi - Kurum Öğretim Elemanıen_US
item.openairetypeArticle-
item.languageiso639-1en-
item.grantfulltextnone-
item.fulltextNo Fulltext-
item.openairecristypehttp://purl.org/coar/resource_type/c_18cf-
item.cerifentitytypePublications-
crisitem.author.dept02.5. Department of Electrical and Electronics Engineering-
Appears in Collections:Elektrik ve Elektronik Mühendisliği Bölümü / Department of Electrical & Electronics Engineering
Scopus İndeksli Yayınlar Koleksiyonu / Scopus Indexed Publications Collection
WoS İndeksli Yayınlar Koleksiyonu / WoS Indexed Publications Collection
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