Please use this identifier to cite or link to this item: https://hdl.handle.net/20.500.11851/6972
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dc.contributor.authorGailevicius, Darius-
dc.contributor.authorJonusauskas, Linas-
dc.contributor.authorSakalauskas, Danas-
dc.contributor.authorHayran, Zeki-
dc.contributor.authorKurt, Hamza-
dc.contributor.authorTurduev, Mirbek-
dc.contributor.authorMalinauskas, Mangirdas-
dc.date.accessioned2021-09-11T15:44:37Z-
dc.date.available2021-09-11T15:44:37Z-
dc.date.issued2017en_US
dc.identifier.citationConference on Advanced Fabrication Technologies for Micro/Nano Optics and Photonics X -- JAN 29-FEB 01, 2017 -- San Francisco, CAen_US
dc.identifier.isbn978-1-5106-0671-5; 978-1-5106-0672-2-
dc.identifier.issn0277-786X-
dc.identifier.issn1996-756X-
dc.identifier.urihttps://doi.org/10.1117/12.2250537-
dc.identifier.urihttps://hdl.handle.net/20.500.11851/6972-
dc.description.abstractIn this work we explore a possibility to apply ultrafast 3D laser nanolithography in conjunction with pyrolysis to acquire glass-ceramic 3D structures in micro- and nano-scale. Laser fabrication allows for production of initial 3D structures with relatively small (hundreds nm - mu m) feature sizes out of SZ2080 hybrid material. Then, post-fabrication heating at 600 degrees C in Ar atmosphere decomposes organic part of the material leaving the glass-ceramic component of the hybrid. Resulting structures are uniformly shrunk by 40%. This brings us one step closer to fabricating highly efficient slow-light absorbers.en_US
dc.description.sponsorshipSPIE, Nanoscribe GmbHen_US
dc.description.sponsorshipNATO projectNATO (North Atlantic Treaty Organisation) [SPS-985048]; European Commissions Seventh Framework Programme Laserlab-Europe IV JRA support BIOAPP [EC-GA 654148]en_US
dc.description.sponsorshipThe work was financially supported by NATO project grant No. SPS-985048 and European Commissions Seventh Framework Programme Laserlab-Europe IV JRA support BIOAPP (EC-GA 654148).en_US
dc.language.isoenen_US
dc.publisherSpie-Int Soc Optical Engineeringen_US
dc.relation.ispartofAdvanced Fabrication Technologies For Micro/Nano Optics And Photonics Xen_US
dc.rightsinfo:eu-repo/semantics/closedAccessen_US
dc.subjectultrafast laseren_US
dc.subject3D lithographyen_US
dc.subjectpolymersen_US
dc.subjecthybrid organic-inorganicen_US
dc.subjectphotonic crystalen_US
dc.subjectpyrolysisen_US
dc.subjectthermal post-treatmenten_US
dc.subjectslow lighten_US
dc.titleLaser Nanolithography and Pyrolysis of Sz2080 Hybrid for Slowing Light in 3d Photonic Crystalsen_US
dc.typeConference Objecten_US
dc.relation.ispartofseriesProceedings of SPIEen_US
dc.departmentFaculties, Faculty of Engineering, Department of Electrical and Electronics Engineeringen_US
dc.departmentFakülteler, Mühendislik Fakültesi, Elektrik ve Elektronik Mühendisliği Bölümütr_TR
dc.identifier.volume10115en_US
dc.authorid0000-0002-6937-4284-
dc.authorid0000-0002-3334-0808-
dc.authorid0000-0003-3542-3874-
dc.authorid0000-0002-6937-4284-
dc.authorid0000-0003-3897-2844-
dc.identifier.wosWOS:000405595200032en_US
dc.identifier.scopus2-s2.0-85019497401en_US
dc.institutionauthorKurt, Hamza-
dc.identifier.doi10.1117/12.2250537-
dc.relation.publicationcategoryKonferans Öğesi - Uluslararası - Kurum Öğretim Elemanıen_US
dc.relation.conferenceConference on Advanced Fabrication Technologies for Micro/Nano Optics and Photonics Xen_US
dc.identifier.scopusquality--
item.openairetypeConference Object-
item.languageiso639-1en-
item.grantfulltextnone-
item.fulltextNo Fulltext-
item.openairecristypehttp://purl.org/coar/resource_type/c_18cf-
item.cerifentitytypePublications-
crisitem.author.dept02.5. Department of Electrical and Electronics Engineering-
Appears in Collections:Elektrik ve Elektronik Mühendisliği Bölümü / Department of Electrical & Electronics Engineering
Scopus İndeksli Yayınlar Koleksiyonu / Scopus Indexed Publications Collection
WoS İndeksli Yayınlar Koleksiyonu / WoS Indexed Publications Collection
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