Please use this identifier to cite or link to this item: https://hdl.handle.net/20.500.11851/1362
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dc.contributor.authorRoy, Rupak Bardhan-
dc.contributor.authorFarhanieh, Omid-
dc.contributor.authorErgün, Arif Şanlı-
dc.contributor.authorBozkurt, Ayhan-
dc.date.accessioned2019-06-26T07:43:38Z
dc.date.available2019-06-26T07:43:38Z
dc.date.issued2017-07-01
dc.identifier.citationRoy, R. B., Farhanieh, O., Ergün, A. S., & Bozkurt, A. (2017). Fabrication of high-efficiency CMUTs with reduced parasitics using embedded metallic layers. IEEE Sensors Journal, 17(13), 4013-4020.en_US
dc.identifier.issn1530-437X
dc.identifier.urihttps://ieeexplore.ieee.org/document/7929385/-
dc.identifier.urihttps://hdl.handle.net/20.500.11851/1362-
dc.description.abstractThe transmit and receive sensitivity of the capacitive micromachined ultrasonic transducer (CMUT) is proportional to the active device capacitance formed by the vacuum gap of the device, and an insulation layer between the gap and the device electrode. In the sacrificial release process of CMUT fabrication, this insulation layer cannot be made arbitrarily thin due to conformality issues. In this paper, we propose and prove the applicability of a micromachining technique by which metallic sacrificial islands are embedded inside grooves etched on the substrate, yielding topology free surfaces. This obviates the conformality requirement, and enables the growth of a thinner insulation layer which reduces the effective gap height, and, hence, improves sensitivity. Embedded metalic layers, which provide a flat surface for subsequent process steps, have also been used as the back electrode of the CMUT, which facilitated the manufacturing of devices with reduced stray capacitance on thermally oxidized wafers. CMUT devices were fabricated using the proposed technique, and their parameters were measured to justify the performance improvement. While the dc bias requirement is reduced by 19%, the output sensitivity of the device is 10% higher than that of the conventional CMUT, and spurious capacitance is decreased by 70%.en_US
dc.description.sponsorshipThis work was supported by The Scientific and Technological Research Council of Turkey under Grant 112E048. This work was presented at the IEEE Sensors Conference 2015. The associate editor coordinating the review of this paper and approving it for publication was Dr. Rosario Morello.en_US
dc.language.isoenen_US
dc.publisherIEEE-Inst Electrical Electronics Engineers Incen_US
dc.relation.ispartofIEEE Sensors Journalen_US
dc.rightsinfo:eu-repo/semantics/closedAccessen_US
dc.subjectCapacitive micromachined ultrasonic transducers (CMUTs)en_US
dc.subjectmicrofabrication and micromachiningen_US
dc.subjectsacrificial etchingen_US
dc.subjectmetal embeddingen_US
dc.subjecttransmit sensitivityen_US
dc.subjectparasitic capacitanceen_US
dc.subjectconformalityen_US
dc.titleFabrication of High-Efficiency CMUTs With Reduced Parasitics Using Embedded Metallic Layersen_US
dc.typeArticleen_US
dc.departmentFaculties, Faculty of Engineering, Department of Electrical and Electronics Engineeringen_US
dc.departmentFakülteler, Mühendislik Fakültesi, Elektrik ve Elektronik Mühendisliği Bölümütr_TR
dc.identifier.volume17
dc.identifier.issue13
dc.identifier.startpage4013
dc.identifier.endpage4020
dc.relation.tubitakThe Scientific and Technological Research Council of Turkey [112E048]en_US
dc.identifier.wosWOS:000403465900008en_US
dc.identifier.scopus2-s2.0-85020874399en_US
dc.institutionauthorErgün, Arif Şanlı-
dc.identifier.doi10.1109/JSEN.2017.2704623-
dc.authorscopusid35429229400-
dc.relation.publicationcategoryMakale - Uluslararası Hakemli Dergi - Kurum Öğretim Elemanıen_US
dc.identifier.scopusqualityQ1-
item.openairecristypehttp://purl.org/coar/resource_type/c_18cf-
item.grantfulltextnone-
item.fulltextNo Fulltext-
item.openairetypeArticle-
item.cerifentitytypePublications-
item.languageiso639-1en-
Appears in Collections:Elektrik ve Elektronik Mühendisliği Bölümü / Department of Electrical & Electronics Engineering
Scopus İndeksli Yayınlar Koleksiyonu / Scopus Indexed Publications Collection
WoS İndeksli Yayınlar Koleksiyonu / WoS Indexed Publications Collection
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