Please use this identifier to cite or link to this item: https://hdl.handle.net/20.500.11851/3968
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dc.contributor.authorYaşar, Abdullah İrfan-
dc.contributor.authorYıldız, Fikret-
dc.contributor.authorEroğul, Osman-
dc.date.accessioned2021-01-22T06:17:10Z-
dc.date.available2021-01-22T06:17:10Z-
dc.date.issued2020-12
dc.identifier.citationYaşar, A. İ., Yıldız, F., & Eroğul, O. Capacitive micromachined ultrasonic transducer: transmission performance evaluation under different driving parameters and membrane stress for underwater imaging applications. Microsystem Technologies, 1-11.en_US
dc.identifier.issn0946-7076
dc.identifier.urihttps://hdl.handle.net/20.500.11851/3968-
dc.identifier.urihttps://doi.org/10.1007/s00542-020-04827-4-
dc.description.abstractTransmission performance of a CMUT element in terms of output pressure and displacements was evaluated. A SIMULINK model of single CMUT element based on mechanical model of MEMS capacitor was used and the analyses were performed under different ac and dc conditions. 2.6 µm thick Si, Poly-Si and Si3Ni4 membranes with a radius 60 µm were used to obtain results for underwater imaging application. Relation between membrane stress and outputs of CMUT was also investigated using SIMULINK model for commonly used CMUT membrane made of Si3Ni4 and polysilicon membrane under different electrical driving parameters. It was observed that different ac signal inputs (sine, square and sawtooth) showed different effects on CMUTs pressure and displacement characteristics. Our results indicated that the maximum output pressure and displacement were obtained in a square waveform. In addition, although stress on membrane increases the displacement and pressure of CMUT membrane made of Poly-Si, quality factor inversely proportional to stress on membrane. Membrane stress has adverse effect on Si3Ni4 membrane transmission outputs. The used model in this study might enable to determine optimum driving electrical inputs and stress on membrane to control CMUT outputs in terms of output pressure, displacement, quality factor and bandwitdh.en_US
dc.language.isoenen_US
dc.publisherSpringer Science and Business Media Deutschland GmbHen_US
dc.relation.ispartofMicrosystem Technologiesen_US
dc.rightsinfo:eu-repo/semantics/closedAccessen_US
dc.subjectUltrasonic transducersen_US
dc.titleCapacitive micromachined ultrasonic transducer: transmission performance evaluation under different driving parameters and membrane stress for underwater imaging applicationsen_US
dc.typeArticleen_US
dc.departmentFaculties, Faculty of Engineering, Department of Biomedical Engineeringen_US
dc.departmentFakülteler, Mühendislik Fakültesi, Biyomedikal Mühendisliği Bölümütr_TR
dc.identifier.volume26
dc.identifier.issue12
dc.identifier.startpage3601
dc.identifier.endpage3611
dc.authorid0000-0002-4640-6570-
dc.identifier.wosWOS:000557508300002en_US
dc.identifier.scopus2-s2.0-85083423389en_US
dc.institutionauthorEroğul, Osman-
dc.identifier.doi10.1007/s00542-020-04827-4-
dc.relation.publicationcategoryMakale - Uluslararası Hakemli Dergi - Kurum Öğretim Elemanıen_US
dc.identifier.scopusqualityQ2-
item.fulltextNo Fulltext-
item.languageiso639-1en-
item.openairetypeArticle-
item.openairecristypehttp://purl.org/coar/resource_type/c_18cf-
item.cerifentitytypePublications-
item.grantfulltextnone-
crisitem.author.dept02.2. Department of Biomedical Engineering-
Appears in Collections:Biyomedikal Mühendisliği Bölümü / Department of Biomedical Engineering
Scopus İndeksli Yayınlar Koleksiyonu / Scopus Indexed Publications Collection
WoS İndeksli Yayınlar Koleksiyonu / WoS Indexed Publications Collection
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