Please use this identifier to cite or link to this item: https://hdl.handle.net/20.500.11851/4062
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dc.contributor.authorDemir, Kazım-
dc.contributor.authorÜnlü, Mehmet-
dc.date.accessioned2021-01-25T11:32:58Z
dc.date.available2021-01-25T11:32:58Z
dc.date.issued2020-08
dc.identifier.citationDemir, K., and Unlu, M. (2020). Miniature MEMS: Novel Key Components Toward Terahertz Reconfigurability. Journal of Microelectromechanical Systems.en_US
dc.identifier.issn1057-7157
dc.identifier.urihttps://ieeexplore.ieee.org/document/9094643-
dc.identifier.urihttps://hdl.handle.net/20.500.11851/4062-
dc.description.abstractWe present an overview of the emerging and enabling miniature MEMS-based components for the terahertz frequencies. The usage of miniature MEMS integrated within the terahertz components is an uprising field of research, which offers reconfigurability, improved performance, and ability to perform unprecedented functions that cannot be achieved using the state-of-the-art semiconductor and optical technologies. In this paper, we discuss the recent progress and future of miniature MEMS-based reconfigurable components and present examples including reconfigurable sources, detectors, metamaterials, and guided-wave components. [2019-0099]en_US
dc.language.isoenen_US
dc.publisherInstitute of Electrical and Electronics Engineers Inc.en_US
dc.relation.ispartofJournal of Microelectromechanical Systemsen_US
dc.rightsinfo:eu-repo/semantics/openAccessen_US
dc.subjectDetectorsen_US
dc.subjectMicromechanical devicesen_US
dc.subjectDipole antennasen_US
dc.subjectAntenna arraysen_US
dc.subjectMillimeter wave technologyen_US
dc.subjectImagingen_US
dc.subjectIntegrated circuitsen_US
dc.subjectDetectorsen_US
dc.subjectmicroelectromechanical systemsen_US
dc.subjectmetamaterialsen_US
dc.subjectsourcesen_US
dc.subjectterahertzen_US
dc.titleMiniature MEMS: Novel Key Components Toward Terahertz Reconfigurabilityen_US
dc.typeReviewen_US
dc.departmentFaculties, Faculty of Engineering, Department of Electrical and Electronics Engineeringen_US
dc.departmentFakülteler, Mühendislik Fakültesi, Elektrik ve Elektronik Mühendisliği Bölümütr_TR
dc.identifier.volume29
dc.identifier.issue4
dc.identifier.startpage455
dc.identifier.endpage467
dc.relation.tubitakinfo:eu-repo/grantAgreement/TÜBİTAK/EEEAG/114E089en_US
dc.authorid0000-0002-6594-0904-
dc.identifier.wosWOS:000554902800003en_US
dc.identifier.scopus2-s2.0-85085761270en_US
dc.institutionauthorÜnlü, Mehmet-
dc.identifier.doi10.1109/JMEMS.2020.2992491-
dc.relation.publicationcategoryDiğeren_US
dc.relation.otherH2020-MSCA-RI under Grant TERA-NANO; 2015 Turkish Academy of Sciences Young Scientist Outstanding Achievement Award Program (TUBA-GEBIP 2015)en_US
dc.identifier.scopusqualityQ2-
item.fulltextNo Fulltext-
item.openairecristypehttp://purl.org/coar/resource_type/c_18cf-
item.languageiso639-1en-
item.cerifentitytypePublications-
item.openairetypeReview-
item.grantfulltextnone-
crisitem.author.dept02.5. Department of Electrical and Electronics Engineering-
Appears in Collections:Elektrik ve Elektronik Mühendisliği Bölümü / Department of Electrical & Electronics Engineering
Scopus İndeksli Yayınlar Koleksiyonu / Scopus Indexed Publications Collection
WoS İndeksli Yayınlar Koleksiyonu / WoS Indexed Publications Collection
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