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Title: Kinetic analysis of 2D Mo2C crystal growth via CVD
Authors: Buke, Goknur Cambaz
Caylan, Ömer Refet
Ogurtani, Omer Tarik
Keywords: two dimensional materials
molybdenum carbide
growth kinetics
chemical vapor deposition
JMAK model
Issue Date: 2023
Publisher: Iop Publishing Ltd
Abstract: We investigated the growth mechanism of 2D Mo2C crystals by chemical vapor deposition (CVD) under various time and temperature conditions. The growth kinetics and mechanism of Mo2C on Cu via chemical vapor deposition (CVD) were investigated using a modified Johnson-Mehl-Avrami-Kolmogorov (JMAK) model. To analyze the surface coverage, we employed scanning electron microscopy (SEM) and applied the modified JMAK model to determine the growth rate and activation energy. The growth rate of Mo2C exhibited temperature-dependent behavior, described by the Arrhenius relationship, with an apparent activation energy of 4 eV. The Avrami plot exhibited an exponent of 3 indicating a complex process with nucleation and growth.
ISSN: 0031-8949
Appears in Collections:Scopus İndeksli Yayınlar Koleksiyonu / Scopus Indexed Publications Collection
WoS İndeksli Yayınlar Koleksiyonu / WoS Indexed Publications Collection

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