Please use this identifier to cite or link to this item: https://hdl.handle.net/20.500.11851/6694
Title: Fabrication of annular photonic crystals by atomic layer deposition and sacrificial etching
Authors: Feng, Junbo
Chen, Yao
Blair, John
Kurt, Hamza
Hao, Ran
Citrin, D. S.
Zhou, Zhiping
Keywords: [No Keywords]
Issue Date: 2009
Publisher: A V S Amer Inst Physics
Abstract: In this article, the fabrication process of annular photonic crystals on silicon-on-insulator wafers was addressed for the first time. A self-alignment procedure for nanofabrication using atomic layer deposition and sacrificial etching was established to place accurately nanosized dielectric rods in nanosized circular air holes. Avoiding the challenging electron-beam lithography alignment, this method achieves atomic level precision and shows high stability. (C) 2009 American Vacuum Society. [DO]: 10.1116/1.3079662]
URI: https://doi.org/10.1116/1.3079662
https://hdl.handle.net/20.500.11851/6694
ISSN: 1071-1023
Appears in Collections:Elektrik ve Elektronik Mühendisliği Bölümü / Department of Electrical & Electronics Engineering
Scopus İndeksli Yayınlar Koleksiyonu / Scopus Indexed Publications Collection
WoS İndeksli Yayınlar Koleksiyonu / WoS Indexed Publications Collection

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