Please use this identifier to cite or link to this item: https://hdl.handle.net/20.500.11851/6972
Title: Laser nanolithography and pyrolysis of SZ2080 hybrid for slowing light in 3D photonic crystals
Authors: Gailevicius, Darius
Jonusauskas, Linas
Sakalauskas, Danas
Hayran, Zeki
Kurt, Hamza
Turduev, Mirbek
Malinauskas, Mangirdas
Keywords: ultrafast laser
3D lithography
polymers
hybrid organic-inorganic
photonic crystal
pyrolysis
thermal post-treatment
slow light
Issue Date: 2017
Publisher: Spie-Int Soc Optical Engineering
Source: Conference on Advanced Fabrication Technologies for Micro/Nano Optics and Photonics X -- JAN 29-FEB 01, 2017 -- San Francisco, CA
Series/Report no.: Proceedings of SPIE
Abstract: In this work we explore a possibility to apply ultrafast 3D laser nanolithography in conjunction with pyrolysis to acquire glass-ceramic 3D structures in micro- and nano-scale. Laser fabrication allows for production of initial 3D structures with relatively small (hundreds nm - mu m) feature sizes out of SZ2080 hybrid material. Then, post-fabrication heating at 600 degrees C in Ar atmosphere decomposes organic part of the material leaving the glass-ceramic component of the hybrid. Resulting structures are uniformly shrunk by 40%. This brings us one step closer to fabricating highly efficient slow-light absorbers.
URI: https://doi.org/10.1117/12.2250537
https://hdl.handle.net/20.500.11851/6972
ISBN: 978-1-5106-0671-5; 978-1-5106-0672-2
ISSN: 0277-786X
1996-756X
Appears in Collections:Elektrik ve Elektronik Mühendisliği Bölümü / Department of Electrical & Electronics Engineering
Scopus İndeksli Yayınlar Koleksiyonu / Scopus Indexed Publications Collection
WoS İndeksli Yayınlar Koleksiyonu / WoS Indexed Publications Collection

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